Industrial thin film processing applications of high peak power, high average power Nd:YAG laser systems
Harrison, Paul Martin
MetadataShow full item record
Three high speed thin film patterning applications have been investigated using a high average power, high peak power laser system. Throughout this work the spatial intensity profile of the laser output was tailored to produce more efficient results. The first application involved the development of rapid laser patterning of an indium tin oxide layer on a glass substrate in order to generate transparent electrodes for a flat panel display. This work showed that the stitch line that occurs in-between adjacent laser pulses was formed by redeposition of material via the plume generated by the second, slightly overlapping pulse which is deposited within the region of overlap, an area which has an increased surface temperature at that time. The second application, laser edge deletion for thin film solar photo-voltaic panels, was an investigation of whether dual wavelength processing was able to avoid introducing micro-cracks into the soda-lime glass substrate. The third application was an examination of high speed removal of an aluminium coating from a stainless steel substrate which demonstrated that the layer could be adequately removed but required a series of highly overlapped pulses.